[2014년]Investigation of Structural Disorder Using Electron Temperature in VHF-PECVD on Hydrogenated Amorphous Silicon Fi
- 정보통신소자연구실
- 조회수433
- 2020-03-11
Investigation of Structural Disorder Using Electron Temperature in VHF-PECVD on Hydrogenated Amorphous Silicon Films for Thin Film Solar Cell Applications