[2010년]Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers
- 정보통신소자연구실
- 조회수414
- 2020-03-11
Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers
Optimized surface passivation of n and p type silicon wafers using hydrogenated SiNx layers